CVD TiN CIP Chamber Kit-軒運科技有限公司-半導體設備廠商

CIP semiconductor equipment parts

CVD TiN CIP Chamber Kit

Process Kit Design Extension: Singular Edge Ring / Outer Shield / Showerhead / Ceramic Isolator / Inner Shield / Top Shield Ceramic / Pumping Port / Chamber Insert

• Defects Reduction & Increase kit life

Provide stable defects throughout the kit life and increase kit life.

• Eliminate Arcing

Eliminate arcing issues due to material build-up.

• Uniformity Improvement

Improve uniformity from the beginning of the kit life to the end of the kit life